2026.05.11
Contents
| 1. | [Technical Notes] Azbil Liquid Leak Detector with Built-in Amplifier Model HPQ-D__ |

Ensuring safe and reliable operation in wet processes is critical—especially in semiconductor, FPD, chemical, and utility applications. Azbil’s HPQ D__ Liquid Leak Detectors provide a proven, maintenance friendly solution for early leak detection across a wide range of liquids.
Reliable detection regardless of liquid type, including pure water, acids/alkalis, IPA, organic solvents, and circulation fluids.

Leak detection immediately after installation without absorbent paper or sensitivity adjustment. After detection, simply wipe the sensor surface and restore operation.

Suitable for confined installation spaces and harsh industrial environments.


PFA protected sensor head and cable prevent liquid ingress and ensure long service life.

LED indicator allows instant visual confirmation of normal or leak condition.

💠Semiconductor: Batch, Single wafer cleaning equipment/ Chemical Mechanical Polishing – CMP
💠Semiconductor & FPD manufacturing: Photolithography process, Heat treatment process
💠Lithium-ion battery manufacturing process: Coater; Electrolytic injection machine
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